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Properties of transparent conductive boron-doped ZnO thin films deposited by pulsed DC magnetron sputtering from Zn1−xBxO targets

  • 【作者】B. Wen,C. Q. Liu,N. Wang,H. L. Wang,S. M. Liu,Y. H. Ren,W. P. Chai
  • 【刊名】Applied Physics A
  • 【作者单位】Taiyuan Normal University Dalian Jiaotong University
  • 【年份】2017
  • 【卷号】Vol.123 No.3
  • 【ISSN】0947-8396
  • 【摘要】 Transparent conducting B-doped ZnO thin films were deposited on normal soda-lime glass substrate by pulsed DC magnetron sputtering from homemade Zn 1−x B x O ceramic targets. All the Zn 1−x B x O targets are single-phase hexagonal wurtzite structure....
  • 【文献类型】 期刊
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