【作者单位】1 Engineering Research Center of Optoelectronic Materials and Devices, School of Materials Science and Engineering, Dalian Jiaotong University, Dalian 116028, China 2 Key Laboratory of Functional Materials Physics and Chemistry (Jilin Normal University), Ministry of Education, Siping 136000, China 3 Department of Chemistry, Taiyuan Normal University, Jinzhong 030619, People’s Republic of China
【年份】2018
【卷号】Vol.213
【页码】241-244
【ISSN】0167-577X
【关键词】Cu 2 ZnSnS 4 film Magnetron sputtering Preferred orientation Single quaternary target Sputtering pressure
【摘要】 Cu 2 ZnSnS 4 films applicable to an absorber material in thin film solar cells were prepared at room temperature by pulsed DC magnetron sputtering from a CZTS ceramic target, and the effects of sputtering pressure on the phase, preferred orientation...