【作者单位】1Department of Physics, Taiyuan Normal University, Jinzhong, Shanxi 030619, China;2Institute of Computational and Applied Physics, Taiyuan Normal University, Jinzhong, Shanxi 030619, China
【年份】2023
【卷号】Vol.773
【页码】139826
【ISSN】0040-6090
【摘要】 In this article, two sets of AlN thin films were produced on sapphire wafers with diverse surface orientations via atomic layer deposition. Various material characterization techniques were applied to investigate the morphological, structural, and o...
