【作者单位】1Department of Physics, Taiyuan Normal University, Shanxi, Jinzhong; 030619, China;2Institute of Computational and Applied Physics, Taiyuan Normal University, Shanxi, Jinzhong; 030619, China
【年份】2023
【ISSN】1556-5068
【摘要】 In this article, two sets of AlN thin films were produced on sapphire wafers with diverse surface orientations via atomic layer deposition . Various surface characterization techniques were applied to investigate the morphological, structural, and o...
