【刊名】Journal of Measurement Science and Instrumentation
【作者单位】山西师范大学现代文理学院转设筹备处；中北大学省部共建动态测试技术国家重点实验室
【年份】2023
【卷号】第1期
【ISSN】1674-8042
【关键词】microelectromechanical system wavelength modulation optical accelerometer
【摘要】 This paper reports a high-frequency silicon carbide sensor that relies on dual-mode wavelength modulation and its application to optical microelectromechanical systems . Based on the properties of as well as SiC and the characteristics of dual-mode ...
