【作者单位】1 Shanxi Datong University, School of Physics and Electronic Science, Shanxi, Datong, 037009, China, 117793; 2 Taiyuan Normal University, Department of Physics, Shanxi, Taiyuan, 030619, China, 66340
【年份】2018
【卷号】Vol.8 No.10
【页码】105314
【ISSN】2158-3226
【摘要】 Sidewall profile reconstruction of microstructures with the high aspect ratio is a problem urgently to be solved in MEMS field. In this paper, a measuring method based on near-infrared light scanning interferometry is presented according to the tran...
