【作者单位】a School of Physics and Electronic Science, Shanxi Datong University, Datong, 037009, China; b Department of Physics, Taiyuan Normal University, Taiyuan, 030619, China
【摘要】 The bottom and sidewall profile reconstruction of microstructures with a high aspect ratio is a problem that urgently needs to be solved in the field of MEMS. Microstructures profile reconstruction method is presented based on near-infrared light tra...
