【作者】Ting Liang，Wangwang Li，Cheng Lei，Yongwei Li，Zhiqiang Li & Jijun Xiong
【刊名】Photonic Sensors
【作者单位】1 Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan, 030051, China; 2 Department of Physics, Taiyuan Normal University, Jinzhong, 030619, China; 3 Institute of Computational and Applied Physics, Taiyuan Normal University, Jinzhong, 030619, China
【ISSN】1674-9251
【关键词】SiC pressure sensor optical-fiber high temperature direct bonding
【摘要】 This paper presents an all-SiC fiber-optic Fabry-Perot pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh environment. The operating principle, fabrication, interface characteristics, and pressure re...
