【作者单位】Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan, 030051, China Ting Liang, Cheng Lei, Yongwei Li, Zhiqiang Li & Jijun Xiong <<#>> Department of Physics, Taiyuan Normal University, Jinzhong, 030619, China Wangwang Li <<#>> Institute of Computational and Applied Physics, Taiyuan Normal University, Jinzhong, 030619, China Wangwang Li
【ISSN】1674-9251
【关键词】SiC pressure sensor optical-fiber high temperature direct bonding
【摘要】 This paper presents an all-SiC fiber-optic Fabry-Perot pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh environment. The operating principle, fabrication, interface characteristics, and pressure re...
