【作者单位】Science and Technology on Electronic Test & Measurement Laboratory，North University of China，Taiyuan 030051，China；Department of Physics，Taiyuan Normal University，Jinzhong 030619，China；Institute of Computational and Applied Physics，Taiyuan Normal University，Jinzhong 030619，China
【年份】2022
【卷号】第12卷
【期号】 第2期
【页码】130
【ISSN】1674-9251
【关键词】SiC pressure sensor optical-fiber high temperature direct bonding
【摘要】 This paper presents an all-SiC fiber-optic Fabry-Perot pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh environment. The operating principle, fabrication, interface characteristics, and pressure re...
